000 00321nam a2200097Ia 4500
008 180131b2006 xxu||||| |||| 00| 0 eng d
020 _a978038724520
080 _a
_b620.1(021) LEO.5.06
100 _aLeondes, Cornelius T, Ed.
245 _aMems/Nems Handbook Techniques And Applications ; Vol 5; Medical Applictions And Moems
260 _a
_bSpringer
_c2006
999 _c58313
_d58313