| 000 | 00303nam a2200097 4500 | ||
|---|---|---|---|
| 080 |
_a620.1 _b(021) LEO.1.06 |
||
| 245 | _aMEMS/NEMS Handbook techniques and applications ; volume 1 design methods in Membs/Nems | ||
| 100 | _aLeondes, Cornelius T, Ed. | ||
| 260 |
_aNew York _bSpringer _c2006 |
||
| 300 | _axviii+380 | ||
| 020 | _a0387245200 | ||
| 999 |
_c39206 _d39206 |
||