Leondes, Cornelius T, Ed. <br/><br/>
MEMS/NEMS Handbook techniques and applications ; volume 1 design methods in Membs/Nems 

 - New York  Springer  2006 
 - xviii+380 
<br/><br/><label>ISBN: </label>0387245200 
<br/><br/><label>Universal Decimal Class. No.: </label>620.1  / (021) LEO.1.06