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MEMS/NEMS Handbook techniques and applications ; volume 1 design methods in Membs/Nems

Leondes, Cornelius T, Ed.

MEMS/NEMS Handbook techniques and applications ; volume 1 design methods in Membs/Nems - New York Springer 2006 - xviii+380

ISBN: 0387245200

Universal Decimal Class. No.: 620.1 / (021) LEO.1.06

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